@incollection{cotte:hal-02469445, TITLE = {{Fabrication of Microelectrodes Using Original ``Soft Lithography'' Processes}}, AUTHOR = {Cotte, St{\'e}phane and Baraket, Abdellatif and Bessueille, Fran{\c c}ois and Gout, St{\'e}phane and Yaakoubi, Nourdin and L{\'e}onard, Didier and Errachid, Abdelhamid}, URL = {https://univ-lemans.hal.science/hal-02469445}, BOOKTITLE = {{New Sensors and Processing Chain}}, PUBLISHER = {{John Wiley \& Sons, Inc.}}, PAGES = {1-9}, YEAR = {2014}, MONTH = Oct, DOI = {10.1002/9781119050612.ch1}, HAL_ID = {hal-02469445}, HAL_VERSION = {v1}, }