%0 Journal Article %T Structural and Micromechanical Assessment of Electrochemically Grown Metal Layers for Si Magnetic Microactuators %+ Centro Nacional de Microelectronica [Spain] (CNM) %+ Institute for Bioengineering of Catalonia [Barcelona] (IBEC) %+ Departament Electronica %A Martinez, Susanna %A Yaakoubi, Nourdin %A Serre, Christophe %A Pérez-Rodríguez, Alejandro %A Morante, Joan Ramon %A Díez-Pérez, Ismael %A Gorostiza, Pau %A Esteve, Jaume %< avec comité de lecture %J MRS Proceedings %V 657 %8 2000 %D 2000 %R 10.1557/PROC-657-EE4.2 %Z Engineering Sciences [physics]/Plasmas %Z Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics %Z Engineering Sciences [physics]/Electromagnetism %Z Chemical Sciences/Chemical engineeringJournal articles %G English %L hal-02468608 %U https://hal-univ-lemans.archives-ouvertes.fr/hal-02468608 %~ UNIV-LEMANS