@article{martinez:hal-02468608, TITLE = {{Structural and Micromechanical Assessment of Electrochemically Grown Metal Layers for Si Magnetic Microactuators}}, AUTHOR = {Martinez, Susanna and Yaakoubi, Nourdin and Serre, Christophe and P{\'e}rez-Rodr{\'i}guez, Alejandro and Morante, Joan Ramon and D{\'i}ez-P{\'e}rez, Ismael and Gorostiza, Pau and Esteve, Jaume}, URL = {https://hal-univ-lemans.archives-ouvertes.fr/hal-02468608}, JOURNAL = {{MRS Proceedings}}, VOLUME = {657}, YEAR = {2000}, DOI = {10.1557/PROC-657-EE4.2}, HAL_ID = {hal-02468608}, HAL_VERSION = {v1}, }