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Article Dans Une Revue Proceedings Année : 2017

Realization of Flexible NMR Microcoils

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Résumé

In this paper, we describe the fabrication of miniaturized flexible Radio frequency RF microcoil for Nuclear Magnetic Resonance (NMR), which have been constructed based on Micro Electro Mechanical Systems (MEMS) technology. 3D Electromagnetic numerical simulations of the physical properties of this microcoil were conducted using Multiphysics software. Numerical simulation shows that the rectangular microantenna (500 × 1000 μm2) on kapton substrate has efficient results in terms of magnetic field, inductance, magnetic energy and resistive losses. This micro-coil is fabricated with three mask levels on polyimide substrate using micromoulding technology.

Dates et versions

hal-02464060 , version 1 (02-02-2020)

Identifiants

Citer

Meriam Khelifa, Nourdin Yaakoubi, Cherif Dridi, Pascal Picart, Latifa Fakri-Bouchet. Realization of Flexible NMR Microcoils. Proceedings, 2017, 1 (4), pp.625. ⟨10.3390/proceedings1040625⟩. ⟨hal-02464060⟩
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